STUDYING THE FORMATION MECHANISMS OF NiSi2 NANOLAYER FORMED ON THE SURFACE AND SUBSURFACE LAYER OF Si SINGLE CRYSTAL BY SOLID PHASE EPITAXY METHOD. Novateur Publications, [S. l.], n. 13, p. 1–115, 2023. Disponível em: https://novateurpublication.org/index.php/np/article/view/233. Acesso em: 14 oct. 2025.