STUDYING THE FORMATION MECHANISMS OF NiSi2 NANOLAYER FORMED ON THE SURFACE AND SUBSURFACE LAYER OF Si SINGLE CRYSTAL BY SOLID PHASE EPITAXY METHOD. Nova. Pub. [Internet]. 2023 Dec. 29 [cited 2025 Oct. 14];(13):1-115. Available from: https://novateurpublication.org/index.php/np/article/view/233